Procedure of Monitoring Wafer Defects and Defect Clustering on in Integrated Circuits Manufacturing Process
碩士 === 國立交通大學 === 工業工程與管理系 === 91 === Integrated circuits manufacturing companies usually use the c-chart to control the wafer defects. The clustering of defects on a wafer becomes evident when the wafer size increases. The clustering phenomenon causes the Possion based c-chart invalid....
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/98657708930371286270 |