Design, Fabrication, and Signal Processing of an Array of Micro-Pressure Sensors
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 91 === An excimer laser micro-machining technique was used to fabricate a micro pressure sensor, 0.7 mm in diameter, on a piezoelectric polyvinylidene fluoride (PVDF) film. The PVDF film is known for its large piezoelectric stress coefficient, high frequency respon...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/73229249118238741459 |