| Summary: | 碩士 === 國立成功大學 === 電機工程學系碩博士班 === 91 === Abstract
The continuous researches on the properties and applications of the piezoelectric material have been carried out since 19th century. Piezoelectric effect is widely used in the driven force or the signal source because the rapid development in the micro-electromechanical systems (MEMS) technology accelerates the realization of the microsensor and micro mechanical structure.
This paper carries out the research of the acceleration sensing system. The system consists of two major parts－the piezoelectric sensor and the readout circuits. Based on the switched capacitor circuits, the measurement of the induced voltage resulted from the acceleration can be completed. As for the piezoelectric sensor, we use the MEMS process to build a cantilever beam. The cantilever beam uses silicon nitride as material of the structure layer, the ZnO as the material of piezoelectric thin film, and gold as the electrodes, respectively. The cantilever sensor generates deflection because of the acceleration. This results in the induced voltage. The induced voltage could be served as an input signal to the readout circuits.
|
|---|
