The Study of Piezoelectric MEMS Accelerometer System
碩士 === 國立成功大學 === 電機工程學系碩博士班 === 91 === Abstract The continuous researches on the properties and applications of the piezoelectric material have been carried out since 19th century. Piezoelectric effect is widely used in the driven force or the signal source because the rapid development in the mi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/70499416176626112822 |