Design and Fabrication of A Miniature Piezoelectric Accelerometer by MEMS Technology
碩士 === 國立成功大學 === 航空太空工程學系碩博士班 === 91 === In recent years, the superior piezoelectric performance of lead-zirconate- titanate, PZT：(Pb(ZrxTi1-x)O3), ceramics materials is applied for micro- electro-mechanical-systems(MEMS) extensively, including micro-actuators、micro-sensor、micro-pump, etc. The...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/31434214709420996232 |