Design of an Integrated Rotary and Linear Micropositioner by Scratch Drive Actuator

碩士 === 國立成功大學 === 航空太空工程學系碩博士班 === 91 === Previous work on micromotor design by using electrostatic scratch drive actuator (SDA) was in fixed axis motion. This thesis presents the design of a micropositioner composed of an innovative axis-free rotary motor and a pair of linear motors by SDA assembl...

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Bibliographic Details
Main Authors: Feng-Yen Hsu, 許豐巖
Other Authors: Shih-Ming Yang
Format: Others
Language:en_US
Published: 2003
Online Access:http://ndltd.ncl.edu.tw/handle/23031003296239001477