Thermal Reactions Between Sputtered Copper Thin Film and Low Dielectric Constant Materials
博士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 91 === Thermal reactions of sputtered Cu films on the thermally grown silicon dioxide (SiO2), spin-on hydrogen silsesquioxane (HSQ), fluorinated silicate glass. (FSG) and organosilicate glass (OSG) layers, with and without TiN/Ti diffusion barrier, were investigat...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/10195041742968568145 |