Deposition of super-hard abrasion-resistance films by plasma chemical vapor ion plating method
碩士 === 國立成功大學 === 化學工程學系碩博士班 === 91 === The technology of modified diamond-like carbon (DLC) films by plasma enhanced chemical vapor deposition has been developed in this study. Besides, a novel technology to deposit hydrogen-free DLC films by particle-free hollow cathode arc discharge is also attem...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/27265034359029033407 |