Design of a Process Estimator Based Neural Network Run-to-Run Process Controller and its Application to Copper CMP
碩士 === 國立中興大學 === 機械工程學系 === 91 === The goal of this thesis is to propose a neural network based process control methodology that combines a neural network run-to-run process controller and a neural network process estimator to better control the output of the erratic and unstable batch process. The...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75533841365457164830 |