Sensitivity Analysis of Vibration Modes of Atomic Force Microscope Cantilevers

• Main Authors: kuan-Tzu Chen, 陳冠慈
• Other Authors: n
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/u8544h

碩士 === 崑山科技大學 === 機械工程研究所 === 91 === In this study, the small amplitude vibration of atomic force microscope (AFM) in continuous material surface contact has been analyzed, including the characteristic equation, frequency and modal sensitivity of the linear vibration system. This study contains the following analyses: 1.The effect of the normal contact stiffness on the sensitivity of the flexural vibration mode. 2. The effect of the normal contact stiffness and the cantilever slope on the sensitivity of the flexural vibration mode. 3. The effect of the normal contact stiffness and the contact damping on the sensitivity of the flexural vibration mode. 4. The effect of the normal and lateral contact stiffness and the contact damping on the sensitivity of the flexural vibration mode. According to the analysis, the following results are obtained：1. As the normal contact stiffness increases, the sensitivity of flexural vibration modes decreases. 2. When the normal contact stiffness is low, the low-order vibration modes are more sensitive than the high-order modes and the most sensitive mode of flexural vibration is first mode. 3. The higher-order vibration modes become more sensitive than the low-order modes when the normal contact stiffness is larger. 4. The horizontal cantilever is slighter sensitive than the sloped cantilever. 5. The sensitivity of flexural modes decreases with increasing normal contact vi damping when the normal contact stiffness is low.