Sensitivity Analysis of Vibration Modes of Atomic Force Microscope Cantilevers
碩士 === 崑山科技大學 === 機械工程研究所 === 91 === In this study, the small amplitude vibration of atomic force microscope (AFM) in continuous material surface contact has been analyzed, including the characteristic equation, frequency and modal sensitivity of the linear vibration system. This study contains the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/u8544h |