A Study of the Micro Tool Using the LIGA-like Technology
碩士 === 華梵大學 === 機電工程研究所 === 91 === The purpose of the paper is to fabricate the micro abrasive tools using a LIGA-like process. The self-designed fixture and simple exposure table were used to carry out a series of the manufacturing process for micro tools. The experimental results sh...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/18275106225905645403 |