| Summary: | 碩士 === 逢甲大學 === 工業工程學所 === 91 === An electro-thermally microactuator is examined with computer experimental approach which is based on the asymmetrical thermal expansion of the microstructure with different widths of two beams. The asymmetrical thermal expansion is occurred when current is passed, and the higher current density in the narrower "hot" arm causes it to heat and expand more than the wider "cold" arm. The magnitude of the deflection depends strongly on the geometry of the microactuator. Because a typical U-shaped lateral electro-thermal actuator is applied, the remaining concerns are the associated parameter and tolerance values. To ensure a truly design optimization is achieved, a simultaneous parameter and tolerance determination is proceeded. Computer experimental approach consists of computer simulation and statistical method. In this study, computer simulation is performed by the existing CAD(Computer-Aided Design) software, ANSYS, the finite element method for the solution of the coupled 3D mechanical problem. The statistical method uses the Response Surface Methodology(RSM) which provides designers, not only the optimal parameter and tolerance values but also the critical component of an electro-thermally microactuator. These features are very important during the early stage of design since it enables the designers to have a feedback and suggestions for possible design improvement, particularly, under uncertain environment.
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