Optimal Parameter and Tolerance Design for an Electro-thermally Microactuator
碩士 === 逢甲大學 === 工業工程學所 === 91 === An electro-thermally microactuator is examined with computer experimental approach which is based on the asymmetrical thermal expansion of the microstructure with different widths of two beams. The asymmetrical thermal expansion is occurred when current is passed, a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/86071559029444614580 |