Facility Relayout Planning of Etch Area for Shifting From a 200mm-wafer to 300mm-wafer Factory
碩士 === 中原大學 === 工業工程研究所 === 91 === To retrofit the existing facility of 8” FAB into 12” FAB’s， that is the most industrial economic size， in terms of systematic method is one of the most popular topic now. But facility required by 12” FAB is quite different from that of 8” one’s， especially in the f...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/23361775091243073069 |