MEMS Technology : Micro Accelerometer Design, Analysis and Fabrication

碩士 === 中華大學 === 機械與航太工程研究所 === 91 === The purpose of this thesis is to design a micro accelerometer by the MEMS technology. The main structures are devoted to the accelerometer design, analysis, simulation and fabrication processes. Since the MEMS technology is still under-development, there is no w...

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Main Authors: Tsung-Han Lee, 李宗翰
Other Authors: Jium-Ming Lin
Format: Others
Language:zh-TW
Published: 2003
Online Access:http://ndltd.ncl.edu.tw/handle/47917780380025421304
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spelling ndltd-TW-091CHPI05980452016-06-24T04:16:12Z http://ndltd.ncl.edu.tw/handle/47917780380025421304 MEMS Technology : Micro Accelerometer Design, Analysis and Fabrication 微機電製程技術:微加速度感測器的設計、分析與製作 Tsung-Han Lee 李宗翰 碩士 中華大學 機械與航太工程研究所 91 The purpose of this thesis is to design a micro accelerometer by the MEMS technology. The main structures are devoted to the accelerometer design, analysis, simulation and fabrication processes. Since the MEMS technology is still under-development, there is no well design rule yet, thus there are a lot of problems to be solved. However, the traditional IC technology has well-developed design rules, thus the yield rate is high. The materials thickness in IC are far more less than those of MEMS devices. Thus there are thermal stress problems in the latter. In this thesis this effect is analyzed first by computer simulation software such as ANSYS and IntelliSuite, then this thesis presents an annealing method to solve this problem. On the other hand, this paper also found that one should be very careful about the wet etch process, otherwise, the micro structure would be destroyed by the residual stress, shearing stress in the wet etch process. Finally, the elimination of sacrifitial layer, e.g., SiO2, studied by active RIE process. The trade-offs of both isotropic and anisotropic etching processes are also made. Jium-Ming Lin 林君明 2003 學位論文 ; thesis 123 zh-TW
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description 碩士 === 中華大學 === 機械與航太工程研究所 === 91 === The purpose of this thesis is to design a micro accelerometer by the MEMS technology. The main structures are devoted to the accelerometer design, analysis, simulation and fabrication processes. Since the MEMS technology is still under-development, there is no well design rule yet, thus there are a lot of problems to be solved. However, the traditional IC technology has well-developed design rules, thus the yield rate is high. The materials thickness in IC are far more less than those of MEMS devices. Thus there are thermal stress problems in the latter. In this thesis this effect is analyzed first by computer simulation software such as ANSYS and IntelliSuite, then this thesis presents an annealing method to solve this problem. On the other hand, this paper also found that one should be very careful about the wet etch process, otherwise, the micro structure would be destroyed by the residual stress, shearing stress in the wet etch process. Finally, the elimination of sacrifitial layer, e.g., SiO2, studied by active RIE process. The trade-offs of both isotropic and anisotropic etching processes are also made.
author2 Jium-Ming Lin
author_facet Jium-Ming Lin
Tsung-Han Lee
李宗翰
author Tsung-Han Lee
李宗翰
spellingShingle Tsung-Han Lee
李宗翰
MEMS Technology : Micro Accelerometer Design, Analysis and Fabrication
author_sort Tsung-Han Lee
title MEMS Technology : Micro Accelerometer Design, Analysis and Fabrication
title_short MEMS Technology : Micro Accelerometer Design, Analysis and Fabrication
title_full MEMS Technology : Micro Accelerometer Design, Analysis and Fabrication
title_fullStr MEMS Technology : Micro Accelerometer Design, Analysis and Fabrication
title_full_unstemmed MEMS Technology : Micro Accelerometer Design, Analysis and Fabrication
title_sort mems technology : micro accelerometer design, analysis and fabrication
publishDate 2003
url http://ndltd.ncl.edu.tw/handle/47917780380025421304
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