MEMS Technology : Micro Accelerometer Design, Analysis and Fabrication
碩士 === 中華大學 === 機械與航太工程研究所 === 91 === The purpose of this thesis is to design a micro accelerometer by the MEMS technology. The main structures are devoted to the accelerometer design, analysis, simulation and fabrication processes. Since the MEMS technology is still under-development, there is no w...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/47917780380025421304 |