除濕空間濕度控制應用之研究
碩士 === 國防大學中正理工學院 === 兵器系統工程研究所 === 91 === ABSTRACT There are a lot of researches on the design of clean rooms due to they are the bases of the semiconductor industry. As the increased sensitivity of the semiconductor manufacturing process to airborne molecular contamination (AMC) produc...
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| Format: | Others |
| Language: | zh-TW |
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2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/37732921077673531224 |