Fabrication of Integrated-Optic Filters based on Ring Resonator

• Main Authors: Yan-Hao Huang, 黃彥豪
• Other Authors: Tzyy-Jiann Wang
• Format: Others
• Language: zh-TW
• Published: 2002
• Online Access: http://ndltd.ncl.edu.tw/handle/72524216590441874184

碩士 === 國立臺北科技大學 === 光電技術研究所 === 90 === Poly-silicon and silicon nitride, which is often used in the semiconductor fabrication, are applied for production of optical waveguides and integrated-optic filter. The stress variations of poly-silicon and silicon nitride on the silicon substrate covered with silicon oxide are studied for different fabrication condition. Since the Si-H bond in the silicon nitride film will cause absorption near 1550nm, the hydrogen are expelled from silicon nitride film by RTA to reduce the absorption of nitride film in the wavelength range of optical communication. The poly-silicon and silicon-nitride ridge waveguides are successfully fabricated and characterized. Integrated-optic filters based on ring resonators are designed and fabricated using silicon-nitride waveguides. The oxygen plasma treatment is used to tune its resonance wavelength. The characteristics of the device treated by different conditions are studied.