Fabrication of Integrated-Optic Filters based on Ring Resonator
碩士 === 國立臺北科技大學 === 光電技術研究所 === 90 === Poly-silicon and silicon nitride, which is often used in the semiconductor fabrication, are applied for production of optical waveguides and integrated-optic filter. The stress variations of poly-silicon and silicon nitride on the silicon substrate c...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/72524216590441874184 |