Fabrication and Design Optimization of Microaccelerometer Using Piezoelectric Thin Film
碩士 === 國立臺灣科技大學 === 機械工程系 === 90 === This thesis discusses the fabrication of the microaccelerometer using piezoelectric thin film. The manufacturing processes under investigation include the film deposition, the surface micromachining, and the bulk micromachining. The manufacturing param...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/74625690570595592372 |