On the Dynamic and Stability Analysis of Electrostatically Actuated Microstructures
碩士 === 國立臺灣科技大學 === 機械工程系 === 90 === The static and dynamic characteristics and the stability of an electrostatically actuated microstructure were investigated in this thesis. First of all, starting from the view of energy, the Rayleigh-Ritz method was adopted in the static analysis. Un-similarly to...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2002
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Online Access: | http://ndltd.ncl.edu.tw/handle/12212035313110579538 |