Design of a Six Degrees-of-freedom Nanometer Resolution Parallel Micro-Positioning Stage
碩士 === 國立臺灣大學 === 機械工程學研究所 === 90 === Precision positioning stages were widely used in many systems. This paper focuses on the development of precision positioning stages with high accuracy and achieving multiple degrees of freedom. Piezoelectric actuators（PZT）are popularly implied in ac...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/28877853868352606772 |