Research of Remote Diagnosis and Maintenance of a Semiconductor Cluster Tool
碩士 === 國立臺灣大學 === 機械工程學研究所 === 90 === The development is still prosperous in semiconductor manufacturing industry in recent years. The wafer size enlarges from 200 mm to 300 mm, and the factory automation is getting more and more important. Since machines are vital resources in the factor...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/48744841906026779476 |