Design and Implementation of a Dispatching Knowledge Representation Model for Semiconductor Tools
碩士 === 國立臺灣大學 === 電機工程學研究所 === 90 === How wafer lots should be dispatched among machines for processing has been an important research topic in production control of semiconductor fabs. Effective methods for lot dispatching of foundry fabs that lead to on time delivery and maximum equipment utiliza...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/14526037914495258422 |