Characterization , Fabrication and Numerical Algorithm for constructing equivalent circuits of capacitive Micromachined Ultrasonic Transducer
碩士 === 國立臺灣大學 === 電信工程學研究所 === 90 === In recent years, capacitive Micromachined Ultrasonic Transducer (cMUT) has been the objects of extensive research in ultrasonic system. The volume of the transducer is small, the cost is low and it can be integrated completely into a single chip, thus both the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89391688420220816182 |