The application of voice coil motors for the active vibration table
碩士 === 國立海洋大學 === 機械與輪機工程學系 === 90 === Abstract The industry relative to ICs, either inside or outside my country, has a higher growth rate than the others. Since IC industry is high tech and high precision manufacturing, their production machines, it is very important to attenuate mi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/00782722686106660139 |