| Summary: | 碩士 === 國立清華大學 === 工程與系統科學系 === 90 === Micro evaporation and temperature sensor chips have been designed and fabricated in this study. The principal of heater and temperature sensor is based on the thermo-resistor effect. The material of micro heaters and temperature sensors choose Platinum (Pt), because of its good linear relationship between resistance and temperature.
There are two designs in this study. First, using 1μm thermal oxide for thermal insulator, and second, using LPCVD 1μm low stress Si3N4 as mask, and then etch through the Silicon wafer by KOH.
The chip with first design can heat up to 174℃ by applying 3.209W and the other design can achieve 386.67℃ when apply 0.17959W. The sensitivity of these two different designs of temperature sensors are 5.329 mV/℃ between 25 to 102℃and 6.35 mV/℃ between 29 to 118℃ respectively.
In the test of liquid evaporation, it needs 3.1135 J to evaporate 0.5μl water completely and the evaporation process takes 1.71 sec. The efficiency of evaporation is 0.292μl/sec, and heat flux is 7.01*108W/m2. The energy consumption to evaporate 0.1μl essential oil is 1.1971 J. And it spent 0.66sec for evaporating essential oil completely. The efficiency of evaporation is 0.152μl/sec, and heat flux is 2.69*108W/m2.
|
|---|
