The Design and Fabrication of Micro Odor Evaporation and Temperature Sensor
碩士 === 國立清華大學 === 工程與系統科學系 === 90 === Micro evaporation and temperature sensor chips have been designed and fabricated in this study. The principal of heater and temperature sensor is based on the thermo-resistor effect. The material of micro heaters and temperature sensors choose Platinum (Pt), bec...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64518217988687793593 |