Applying High Aspect Ratio BELST Process in Vertical Actuated Electrostatic Micro Scanning Mirror
碩士 === 國立清華大學 === 動力機械工程學系 === 90 === Angular motion plays a crucial role in optical applications such as switching and scanning. The angular motion is available using electrostatic actuation like parallel plate, lateral comb, and vertical comb. Among them the vertical comb actuator (VCA)...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/79226695404888051037 |