The Study of MEMS Self-Assembly Technology
碩士 === 國立清華大學 === 動力機械工程學系 === 90 === Surface micro-machining technology is based on the planar integrated circuit process. Due to the nature of surface micro-machining process, a fundamental problem is its inability to produce highly 3D structures. Therefore, the applications may be limited. To acc...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/61526163575371472609 |