Study of Adhesion, Residual Stress, and Squeeze Film Effect in Plates of Microstructures
博士 === 國立清華大學 === 動力機械工程學系 === 90 === Microelectronmechanical systems (MEMS) become one of the most promising research areas, and have gradually earned the respect in industry, by the advantages of tiny mass and size, fast dynamic response, wide usage in many regimes, and batch fabricatio...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/24315812166439899131 |