Fabricate sub-10 nm electrode gaps by the method of E-beam lithography
碩士 === 國立清華大學 === 物理學系 === 90 ===
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Format: | Others |
Language: | zh-TW |
Published: |
2002
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Online Access: | http://ndltd.ncl.edu.tw/handle/80443893095727643117 |