Interfacial Reactions of Ytterbium Metal Thin Films on Silicon

博士 === 國立清華大學 === 材料科學工程學系 === 90 === Abstract Interfacial reactions of Yb thin films on silicon have been studied by Auger electron spectroscopy (AES), glancing incidence X-ray diffractometry (GIXRD), scanning electron microscopy (SEM), transmission electron microscopy (T...

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Bibliographic Details
Main Authors: Kuan-Shou Chi, 紀冠守
Other Authors: Lih-Juann Chen
Format: Others
Language:en_US
Published: 2002
Online Access:http://ndltd.ncl.edu.tw/handle/28729379305344607291