Annealing of epitaxial aluminum and titanium films on si(111)

Annealing of epitaxial aluminum and titanium films on si(111)

碩士 === 國立清華大學 === 材料科學工程學系 === 90 ===

Bibliographic Details
Main Authors:	Le-Chung Her, 何立群
Other Authors:	S.T. Wu
Format:	Others
Language:	zh-TW
Published:	2002
Online Access:	http://ndltd.ncl.edu.tw/handle/29310257528253149242

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