Annealing of epitaxial aluminum and titanium films on si(111)

碩士 === 國立清華大學 === 材料科學工程學系 === 90 ===

Bibliographic Details
Main Authors: Le-Chung Her, 何立群
Other Authors: S.T. Wu
Format: Others
Language:zh-TW
Published: 2002
Online Access:http://ndltd.ncl.edu.tw/handle/29310257528253149242