The study of Ta2O5 thin film deposited on Pt(O) electrode by selective chemical vapor deposition

碩士 === 國立清華大學 === 材料科學工程學系 === 90 ===

Bibliographic Details
Main Author: 黃維邦
Other Authors: 吳泰伯
Format: Others
Language:zh-TW
Published: 2002
Online Access:http://ndltd.ncl.edu.tw/handle/38214179055799347533
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spelling ndltd-TW-090NTHU01590132015-10-13T10:34:05Z http://ndltd.ncl.edu.tw/handle/38214179055799347533 The study of Ta2O5 thin film deposited on Pt(O) electrode by selective chemical vapor deposition 利用Pt(O)電極開發五氧化二鉭(Ta2O5)薄膜之選擇性化學氣相沈積技術研究 黃維邦 碩士 國立清華大學 材料科學工程學系 90 吳泰伯 2002 學位論文 ; thesis 70 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立清華大學 === 材料科學工程學系 === 90 ===
author2 吳泰伯
author_facet 吳泰伯
黃維邦
author 黃維邦
spellingShingle 黃維邦
The study of Ta2O5 thin film deposited on Pt(O) electrode by selective chemical vapor deposition
author_sort 黃維邦
title The study of Ta2O5 thin film deposited on Pt(O) electrode by selective chemical vapor deposition
title_short The study of Ta2O5 thin film deposited on Pt(O) electrode by selective chemical vapor deposition
title_full The study of Ta2O5 thin film deposited on Pt(O) electrode by selective chemical vapor deposition
title_fullStr The study of Ta2O5 thin film deposited on Pt(O) electrode by selective chemical vapor deposition
title_full_unstemmed The study of Ta2O5 thin film deposited on Pt(O) electrode by selective chemical vapor deposition
title_sort study of ta2o5 thin film deposited on pt(o) electrode by selective chemical vapor deposition
publishDate 2002
url http://ndltd.ncl.edu.tw/handle/38214179055799347533
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