The study of Ta2O5 thin film deposited on Pt(O) electrode by selective chemical vapor deposition

碩士 === 國立清華大學 === 材料科學工程學系 === 90 ===

Bibliographic Details
Main Author: 黃維邦
Other Authors: 吳泰伯
Format: Others
Language:zh-TW
Published: 2002
Online Access:http://ndltd.ncl.edu.tw/handle/38214179055799347533