Synthesis and Characterization of Amorphous Carbon Nitrides for Electron Field Emission, Nano-structure and Low Dielectric Properties by ECR-CVD System
博士 === 國立清華大學 === 材料科學工程學系 === 90 === This thesis mainly focuses on the influence of precursor gases and pressure, and/or the applied negative dc/rf bias for the synthesis of three different amorphous carbon nitride (a-C:N) compounds using ECR-CVD system. One is the a-C:N thin films on Si...
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| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/24540281315758232490 |