Low Temperature and Normal Pressure Plasma Equipment Developed for destroying Perfluorocompounds
碩士 === 國立屏東科技大學 === 環境工程與科學系 === 90 === The purpose of this study was to develop a low temperature and normal pressure plasma equipment for destroys CF4 of Perfluorocompounds. The plasma equipment had been successfully established, fabricated and tested. In the process of testing, some pa...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50845198938527119910 |