Design and Simulation of Langmuir Probe in Plasma Diagnostic System
碩士 === 國立東華大學 === 電機工程學系 === 90 === The electrical probe is called Langmuir probe, which is immersed in a plasma system to get important plasma information. Generally, the probe is connected by an adjustable voltage source (-50~+50 DC). The measured current collected by the probe is a function of th...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2002
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Online Access: | http://ndltd.ncl.edu.tw/handle/60557035098846968335 |