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碩士 === 國立中央大學 === 光電科學研究所 === 90 === Abstract Since the uniform of thickness is different in every position on the thin film, useful area maybe small in a large area thin film application. In order to making multi-layer thin film, we have to use different material that has different emitter factor...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/66793196934257950271 |