The Design, Analysis and Simulation of Capacitive Micro-Accelerometer System and Sensing Circuit
碩士 === 國立交通大學 === 電機與控制工程系 === 90 === The present dissertation studies the system architecture and sensing circuits of a capacitive micro-accelerometer. Sigma-delta concept is used as the system architecture of micro-accelerometer for the purpose of high S/N ratio, digital output and clos...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/14106462106668279365 |