Surface Reaction of Tungsten Complex (tBuN)2W(NEt2)2 on Si(100)
碩士 === 國立交通大學 === 應用化學系 === 90 === The surface reaction of (tBuN)2W(NEt2)2 on Si(100) has been investigated using Temperature Programmed Desorption (TPD), Low-Energy Electron Diffraction (LEED) and X-ray Photoelectron Spectroscopy (XPS). TPD result shows that, besides molecular amine deso...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50371201586083017324 |