Study on the Optimization of High Transmittance Attenuated Phase-Shifting Mask by Design of Experiment
碩士 === 國立交通大學 === 應用化學系 === 90 === Without changing exposure source, the size of device can be reduced by resolution enhancement techniques (RETs). The application of design of experiment (DOE) can increase the process latitude by optimizing parameters and process settings with no extra c...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/48746239135729494409 |