Mixed Convective Recirculating Gas Flow Patterns in a Model Lamp Heated Vertical Rapid Thermal Processor: Effects of Showerhead
碩士 === 國立交通大學 === 機械工程系 === 90 === The effects of the showerhead on the recirculating air flow in a model lamp heated vertical rapid thermal processor for an eight-inch wafer is extensively investigated by experimental flow visualization. A thick copper disk is used to simulate the wafer...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/96260560112957479928 |