Applications of SiGe on The Polycrystalline Silicon Thin-Film Transistors
碩士 === 國立交通大學 === 電子工程系 === 90 === In this dissertation, we proposed two different novel polycrystalline-silicon thin-film transistors (poly-Si TFTs) to improve device performance. Firstly, a new SiGe spacer with lightly-doped drain (LDD) structure was fabricated to reduce the anomalous l...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80497423033967662610 |