Excimer Laser Crystallization of Si Film for Poly-Si TFT Device
博士 === 國立交通大學 === 材料科學與工程系 === 90 === In this study, the crystallization of a-Si with semi-Gaussian excimer laser was investigated. After the single-shot excimer laser process, the poly-Si region showed grains with a wide range of sizes corresponding to the Gaussian distributed laser ener...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/10160203242103772068 |