Fabrication of Nanoscale Oxide PatternsOn Silicon Wafer Using Scanning Probe Microscope
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 90 === The behavior and profile of oxide grown by the Atomic Force Microscope (AFM) probe on silicon wafer is researched in view of electrochemical reaction in this study. There are not many theoretic models describing how the parameters affect height and width of g...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/96761662025527055425 |