Fabrication of 3D Micro Structure using Excimer Laser

• Main Authors: Chin-Liang Kuo, 郭晉良
• Other Authors: Yung-Chun Lee
• Format: Others
• Language: zh-TW
• Published: 2002
• Online Access: http://ndltd.ncl.edu.tw/handle/qm8r23

碩士 === 國立成功大學 === 機械工程學系碩博士班 === 90 === This study applies excimer laser micro-machining technology for manufacturing 3D axially symmetrical micro-structures. It is based on a work-piece rotation or mask rotation method in conjunction with the unique capabilities of an excimer laser micro-machining system. Specially designed laser masks have been developed for machining various kinds of 3D surface profiles. The goal is to understand the feasibility of this micro-machining method and its accuracy in producing a given profile of structure surface. Surface roughness and machining speed are also under evaluation. The research is carried out on three different polymer materials, namely, PMMA, PC, and PS. Axially symmetrical micro-structures with concave and convex surfaces are manufactured by the mask rotation method. The surface profiles have been characterized and compared with their theoretical counterparts. Good agreement is observed. Furthermore, PC and PS have better surface roughness in comparison to PMMA. The machining time for each structure is limited to few minutes, which is very satisfactory. In order to overcome several limitations on the excimer laser micro-machining system, this work also re-developed the optical system for the laser beam so that the machining can be carried out on an optical table. This greatly enhances the performance of the micro-machining system and its flexibility. A commercial optical analysis software (ZEMAX) has also been used for analyze the system. The work presented in this thesis can be very useful to future studies on excimer laser micro-machining and LIGA-like MEMS technology development.